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MLI Series – Industrial Excimer Lasers

LUXINAR(IRADION LASER GmbH)

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Laser Marking|Laser Scribing|Laser Drilling|Laser Cutting|laser ablation :: Home :: Products :: NANO FAKTUR

NANO FAKTUR

EBD-060100 DSP Controller

EBD-060100 controllers provide economical closed-loop operation. The nFControl Basic Software offers the ability to easily change control parameters via a Windows-based GUI. Controllers work with the widely-used strain-gage sensors. Their versatile encapsulation allows for either simple integration into OEM equipment or table-top usage.

EBD-120 Digital Controllers

nanoFaktur is introducing its new line of digital controllers. Customers´ demands have consequently been realized with this. Starting with the enclosure: All interfaces are placed on the front side, so that wiring- and access space can be saved decisively. There are shackles on both the back and on the bottom, so that the most practical integration can be chosen.

The second-generation EBDs are available for driving and reading strain-sensors and capacitive sensors. The achievable resolution is 5 ppm (rms) of the systems´ nominal ranges. Internal algorithms allow for linearization after characterizing with reference measurement-systems. At nanoFaktur, highest-accuracy probes referring to official standards are being employed as references. Thus systems can be linearized to better than 0.01% of their respective full displacements.

T2a Tip/Tilt, Beam-Steering

T2a piezo-driven platforms tip and tilt reflective optics in only milliseconds – this with resolutions of nano-rad magnitude. The two standard versions with 6 and 12 mrad deflection are made for optics with up to 3″ diameters. The perpendicular axes are at one level 8.3 mm below the platform-surface.

L3a XYZ-Stages, 600 µm, Aperture

L3a Stages are made for scanning and tracking. The basic positioning-range for X and Y is 600 μm. These stages are ideal for atomic-force and nearfield microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.

L3a XYZ-Stages, 300 µm, Aperture

L3a Stages are made for scanning and tracking. The basic positioning-range for X and Y is 300 μm. These stages are ideal for atomic-force and near-field microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.

L2a XY-Stages, 300/600 µm, Aperture

L2a Stages are made for scanning. The positioning-ranges are 300 μm or 600 μm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes .

CPa Z-Stages, 500 µm

CPa-b00500 are compact Z-stages providing long ranges at small dimensions. The footprint is 60×60 mm only.

CPa Z-Stages, 250 µm

CPO-L00250 and CPS-D00250 are compact Z-stages with smallest dimensions and long ranges. The footprint is 40×40 mm only.

CPa Z-Stages，100μm

CPO-L00100 and CPS-D00100 are compact Z-stages with smallest dimensions. The footprint is 40×40 mm only.

C1a X-Stages, 600 µm

C1O-L00600 and C1S-D00600 are compact X-stages with smallest dimensions at ranges as long as 900 µm. The size is 60x60x21.5 mm only.

C1a X-Stages, 250 µm

C1O-L00250 and C1S-D00250 are compact X-stages with smallest dimensions. The footprint is 40×40 mm only. The large range of more than 300 µm is unique for those dimensions.

C1a X-Stages，100μm

C1O-L00100 and C1S-D00100 are compact X-stages with smallest dimensions. The footprint is 40×40 mm only. The stiffness and lowest resonances are comparably high. So that the stages can be employed high-dynamically.

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