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Laser Marking|Laser Scribing|Laser Drilling|Laser Cutting|laser ablation :: Home :: Products :: NANO FAKTUR :: L2a XY-Stages, 300/600 µm, Aperture
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L2a XY-Stages, 300/600 µm, Aperture
L2a Stages are made for scanning. The positioning-ranges are 300 μm or 600 μm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes .

 
Detail
Product-Number L2S-D10300 L2S-D10600 Unit
       
Position-Sensors Strain-Gage (SGS), Full-Bridge  
Range, closed loop 300 600 µm
Range, open loop (-45.. 180V) 420 720 µm
Resolution, closed loop 3 6 nm
Resolution, open loop 1 2 nm
Linearity, closed loop 0.2 %
Repeatability, closed loop 30 60 nm
Stiffness 1 0.5 N/µm
Resonance, XY, unloaded 210 175 Hz
Resonance, Rot Z, unloaded 270 215 Hz
El. Capacitance @ 1V eff 1kHz 13.2 µF
Dimensions (LxWxH) 150x150x30 mm
Aperture, Dimensions (LxW) 66×66 mm
Body/Platform-Material Aluminum, black  
Operating Temperature -20.. 80 °C
Connector DSub25  
Cable length 1.5 mm

 
Specification
L2a Stages are made for scanning. The positioning-ranges are 300 μm or 600 μm. These stages are only 30 mm high. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. The large aperture of 66×66 mm allows for access to the samples from top and bottom. L2a stages are also available with integrated Z-axes .

 
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