| Product-Code |
CPO-L00100 |
CPS-D00100 |
Unit |
| |
|
|
|
| Position-Sensor |
|
SGS, Full-Bridge |
|
| Range, Closed Loop |
– |
100 |
µm |
| Range, Open Loop (0..150 V) |
75 |
µm |
| Range, Open Loop (-45..180 V) |
120 |
µm |
| Resolution, open loop |
0.5 |
nm |
| Resolution, closed loop |
– |
1 |
nm |
| Linearity, closed loop |
– |
0.2 |
% |
| Repeatability |
– |
10 |
nm |
| Push/Pull |
15/10 |
N |
| Lateral Force |
10 |
N |
| Stiffness |
1.5 |
N/µm |
| Resonance, unloaded |
370 |
Hz |
| Resonance, with 100 g load |
310 |
Hz |
| Electrical Capacitance @ 1V eff, 1kHz |
2.2 |
µF |
| Body-Material |
Aluminium, stainless steel |
|
| Wire-Length |
1.5 |
m |
| Connector |
Lemo |
DSub15 |
|
| Operating Temperature |
-20.. 80 |
°C |
|
|
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CPa Z-Stages¡A100£gm
Detail 
