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Laser Marking|Laser Scribing|Laser Drilling|Laser Cutting|laser ablation :: Home :: Products :: NANO FAKTUR :: L3a XYZ-Stages, 600 µm, Aperture
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L3a XYZ-Stages, 600 µm, Aperture
L3a Stages are made for scanning and tracking. The basic positioning-range for X and Y is 600 μm. These stages are ideal for atomic-force and nearfield microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.

 
Detail
Product-Number XY600Z20 XY600Z50 XY600Z100 XY600Z300 Unit
           
Position-Sensors Strain Gage, Full Bridge  
Ranges, closed loop 600/600/20 600/600/50 600/600/100 600/600/300 µm
Ranges, open loop (-45.. 180V) 720/720/24 720/720/60 720/720/120 720/720/360 µm
Resolution, closed loop, XY/Z 6/0.2 6/0.3 6/0.5 6/1.5 nm
Resolution, open loop, XY/Z 3/0.1 3/0.3 3/0.5 3/1.5 nm
Linearity, closed loop 0.2 %
Repeatability, XY/Z 60/1 60/3 60/5 60/15 nm
Resonance, XY, unloaded 160 Hz
Resonance, Z, unloaded 550 520 510 410 Hz
El. Capacitance @ 1Veff 1kHz XY13.2/Z4.4 XY13.2/Z8.8 XY13.2/Z13.2 µF
Dimensions (LxWxH) 150x150x30 mm
Aperture, Dimensions (LxW) 66×66 mm
Body/Platform-Material Aluminum, black  
Operating Temperature -20.. 80 °C
Connector DSub25  
Cable length 1.5 m
Specification
L3a Stages are made for scanning and tracking. The basic positioning-range for X and Y is 600 μm. These stages are ideal for atomic-force and nearfield microscopy. They are only 30 mm high and offer 66×66 mm apertures. High precision frictionless flexure guiding leaves close to zero cross-talk and results in excellent flatness of motion. Versions with different Z-ranges are available, in order to serve those applications that require more dynamics and higher resolution, as well as those that have to cover larger height-variations.

 
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