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NANO FAKTUR

CPa Z-Stages, 500 µm

CPa-b00500 are compact Z-stages providing long ranges at small dimensions. The footprint is 60×60 mm only.

Detail

Product-Code	CPO-L00500	CPS-D00500	Unit

Position-Sensor	–	SGS, Full-Bridge
Range, Open Loop (-45..180 V)	600	600	µm
Range, Closed Loop	–	500	µm
Resolution, open loop	3	3	nm
Resolution, closed loop	–	5	nm
Linearity, closed loop	–	0.2	%
Repeatability	–	50	nm
Push/Pull, maximum	40/20		N
Lateral Force, maximum	10		N
Stiffness	0.15		N/µm
Resonance, unloaded	260		Hz
Resonance, with 100 g load	180		Hz
Electrical Capacitance @ 1V eff, 1kHz	4.4		µF
Body-Material	aluminum/stainless-steel
Connector	Lemo	DSub15
Operating Temperature	-20..+80		°C

Specification

CPa-b00500 are compact Z-stages providing long ranges at small dimensions. The footprint is 60×60 mm only.