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NANO FAKTUR

CPa Z-Stages，100μm

CPO-L00100 and CPS-D00100 are compact Z-stages with smallest dimensions. The footprint is 40×40 mm only.

Detail

Product-Code	CPO-L00100	CPS-D00100	Unit

Position-Sensor		SGS, Full-Bridge
Range, Closed Loop	–	100	µm
Range, Open Loop (0..150 V)	75		µm
Range, Open Loop (-45..180 V)	120		µm
Resolution, open loop	0.5		nm
Resolution, closed loop	–	1	nm
Linearity, closed loop	–	0.2	%
Repeatability	–	10	nm
Push/Pull	15/10		N
Lateral Force	10		N
Stiffness	1.5		N/µm
Resonance, unloaded	370		Hz
Resonance, with 100 g load	310		Hz
Electrical Capacitance @ 1V eff, 1kHz	2.2		µF
Body-Material	Aluminium, stainless steel
Wire-Length	1.5		m
Connector	Lemo	DSub15
Operating Temperature	-20.. 80		°C

Specification

CPO-L00100 and CPS-D00100 are compact Z-stages with smallest dimensions. The footprint is 40×40 mm only.