| Product-Number |
C1O-L00600 |
C1S-D00600 |
Unit |
| |
|
|
|
| Position-Sensor |
– |
SGS |
|
| Range (-45..180 V) |
900 |
900 |
µm |
| Range, closed loop |
– |
600 |
µm |
| Resolution, open loop |
4 |
4 |
nm |
| Resolution, closed loop |
– |
6 |
nm |
| Linearity, closed loop |
– |
0.2 |
% |
| Repeatability, closed loop |
– |
50 |
nm |
| Load |
200 |
g |
| Push/Pull |
50/20 |
N |
| Stiffness |
0.15 |
N/µm |
| Lowest Resonance, unloaded |
190 |
Hz |
| El. Capacitance @ 1V eff. 1kHz |
4.4/axis |
µF |
| Body-Material |
aluminum, stainless steel |
|
| Dimensions |
60x60x21.5 |
mm |
| Wire-Length |
1.5 |
m |
| Connector |
Lemosa |
DSub15 |
|
| Operating Temperature |
-20.. 80 |
°C |
|
|
Click here download the file
C1a X-Stages, 600 µm
Detail 
