| Product-Number |
SPS-D00120 |
SPS-D00450 |
SPS-D00650 |
Unit |
| |
|
|
|
|
| Displacement Sensor |
strain gages, full-bridge |
|
| Displacement, closed loop |
120 |
450 |
650 |
µm |
| Displacement (-30..160 V) |
170 |
580 |
820 |
µm |
| Resolution, open loop |
0.4 |
1 |
2 |
nm |
| Resolution, closed loop |
0.6 |
2 |
3 |
nm |
| Linearity, closed loop |
0.1 |
% |
| Repeatability, closed loop |
6 |
14 |
21 |
nm |
| Push/Pull |
50/20 |
50/20 |
40/15 |
N |
| Resonance, unloaded |
380 |
250 |
130 |
Hz |
| El. Capacitance @ 1V eff. 1kHz |
4.4 |
13.2 |
13.2 |
µF |
| Electrical Connection |
D-Sub 15 |
|
| Dimensions, L x W x H |
237 x 156 x 15 mm |
mm |
| Aperture, L x W |
142 x 110 |
mm |
| Body-Material |
aluminum, black anodized |
|
| Operating Temperature |
-20..80 |
°C |
|
|