Product-Code |
SFS-D01000 |
Unit |
|
|
|
Position-Sensor |
SGS, Full-Bridge |
|
Range, Closed Loop |
1000 |
µm |
Range, Open Loop (-35.. 150 V) |
1100 |
µm |
Resolution, open loop |
5 |
nm |
Resolution, closed loop |
10 |
nm |
Linearity, closed loop |
0.2 |
% |
Repeatability |
100 |
nm |
Push/Pull |
20/10 |
N |
Load |
300 |
g |
Stiffness |
0.1 |
N/µm |
Resonance |
135 |
Hz |
Resonance, w/ 250 g load |
80 |
Hz |
Electrical Cap. @ 1V eff, 1kHz |
17.8 |
µF |
Body-Material |
aluminum/stainless-steel |
|
Operating Temperature |
-20..80 |
°C |
|
|