Product-Code |
SFS-D10100 |
SFS-D10300 |
SFS-D10600 |
Unit |
|
|
|
|
|
Position-Sensor |
SGS, Full-Bridge |
|
Range, Closed Loop |
100 |
300 |
600 |
µm |
Range, Open Loop (-45..180 V) |
130 |
370 |
680 |
µm |
Resolution, open loop |
0.5 |
1 |
2 |
nm |
Resolution, closed loop |
1.0 |
3 |
6 |
nm |
Linearity, closed loop |
0.2 |
0.2 |
0,2 |
% |
Repeatability |
10 |
28 |
50 |
nm |
Push/Pull, maximum |
20/15 |
20/15 |
20/10 |
N |
Stiffness |
0.38 |
0.22 |
0.2 |
N/µm |
Resonance, with thread-adapter |
470 |
310 |
250 |
Hz |
Electrical Cap. @ 1V eff, 1kHz |
1.1 |
3.3 |
6.6 |
µF |
Body-Material |
aluminum/stainless-steel |
|
Operating Temperature |
-20..80 |
°C |
|
|