| Product-Code |
SFS-D00150 |
Unit |
| |
|
|
| Position-Sensor |
SGS, Full-Bridge |
|
| Range, Closed Loop |
150 |
µm |
| Range, Open Loop (0..150 V) |
180 |
µm |
| Range, Open Loop (-45..180 V) |
280 |
µm |
| Resolution, open loop |
0,8 |
nm |
| Resolution, closed loop |
1,5 |
nm |
| Linearity, closed loop |
0,2 |
% |
| Repeatability |
15 |
nm |
| Load |
130 |
g |
| Push/Pull, maximum |
10/5 |
N |
| Lateral Force, maximum |
5 |
N |
| Stiffness |
0,1 |
N/µm |
| Resonance, with thread-adapter |
200 |
Hz |
| Resonance, with 125 g objective |
80 |
Hz |
| Elektrical Capacitance @ 1V eff, 1kHz |
2.2 |
µF |
| Body-Material |
aluminum/stainless-steel |
|
| Operating Temperature |
-20..+80 |
°C |
|
|