| Product-Code |
SFS-D00100 |
Unit |
| |
|
|
| Position-Sensor |
SGS, Full-Bridge |
|
| Range, Closed Loop |
100 |
µm |
| Range, Open Loop (0..150 V) |
100 |
µm |
| Range, Open Loop (-45..180 V) |
160 |
µm |
| Resolution, open loop |
0.5 |
nm |
| Resolution, closed loop |
1.0 |
nm |
| Linearity, closed loop |
0.2 |
% |
| Repeatability |
10 |
nm |
| Push/Pull, maximum |
20/10 |
N |
| Lateral Force, maximum |
10 |
N |
| Stiffness |
0.5 |
N/µm |
| Resonance, with thread-adapter |
620 |
Hz |
| Resonance, with 150 g objective |
260 |
Hz |
| Elektrical Capacitance @ 1V eff, 1kHz |
3.3 |
µF |
| Body-Material |
Aluminum/Stainless-Steel |
|
| Operating Temperature |
-20..80 |
°C |
|
|